Scanning Auger microscopy is used to examine and analyse surfaces with high spatial resolution. An Auger Microprobe comprises an ultra high vacuum (UHV) scanning microscope column combined with an electron energy analyser. The electron-excited Auger electron spectrum gives information of the top few atomic layers of a sample, because the low energy Auger electrons (20-2000eV) only retain their characteristic energies when they escape without undergoing inelastic collisions. 

The recently developed high efficency hemispherical analysers give good energy resolution even with short collection time. Together with improved electron optical performance and a high brightness field emission gun, chemical analysis of sub-micron areas on a sample top surface is now a reality. The latest model, the JAMP-9500F, also has a neutralization gun, enabling analysis of insulating materials.
(Read more about insulating materials)

As well as providing 1D and 2D data (point analyses, linescans, and maps), the third dimension – depth – can be analysed by alternating analysis with ion-etching, which removes material layer by layer.

The JEOL instruments feature a high level of automation making them easy to use and especially suitable for "industrial" applications where multiple or repetitive analyses can be easily set up. 

A wide range of optional accessories are available either to increase the analytical capability of the instrument (XPS, SIMS and EDS etc.) or to increase the sample treatment capability (e.g. in-situ fracture stage, heating stage).

	JAMP-7810
	Specifications Resolution SEI: 8 nm Resolution AES: 35 nm Analytical resolution: 0.15 - 0.5 % Energy range:  0 - 3000 eV Electron source: LaB6 Acc.Voltage: 0.5 - 30 kV Magnification:  20 - 300,000X
	JAMP-9500F
	Specifications Resolution SEI:  3 nm Resolution AES: 8 nm Analytical resolution: 0.05 - 0.6 % Energy range: 10 - 4000 eV Electron source: Schottky FE Acc.Voltage:  0.5 - 30 kV Magnification: 20 - 500,000X