An electron probe microanalyzer or microprobe is basically a scanning electron microscope designed and optimized for X-ray analysis of elements from very small areas. The JEOL instruments can be equipped with up to 5 wavelength dispersive X-ray spectrometers (WDS) and an energy dispersive X-ray spectrometer (EDS). This combination can simultaneously analyse up to 21 elements plus collect image signals from backscatter and secondary electron detectors.

The use of WDS spectrometers provides for:

• high detection sensitivity for trace elements.
• high accuracy of quantitative analysis.
• high resolving power for adjacent X-ray spectra.
• high accuracy of light elements analysis.

The system is highly automated and controlled by a powerful UNIX workstation system.

The new JXA-8500F with an in-lens Schottky high brightness field emitter, angle control lens and new electron optics achieves a small probe diameter at low kV and high current. This permits real and easy submicron WDS analysis of smaller and shallower areas than the systems with tungsten or LaB₆ emitters.

	JXA-8100/8200 Superprobe
	Specifications Spectrometers: max 5 WDS,1 EDS Acc.Voltage: 0.2 to 30 kV Magnification: 40 to 300,000X Sample size max: 100 x 100 mm Stage speed max: 15 mm/s Probe current: 10-12 to 10-5 A Current stability: 0.5x10-3/h
	JXA-8500F Field emission microprobe
	Specifications Spectrometers: max 5 WDS,1 EDS Acc.Voltage: 1 to 30 kV SEI resolution: 3 nm at 30 kV Magnification: 40 to 300,000X Sample size max: 150 x 150 mm Stage speed max: 15 mm/s Probe size: 40 nm at 10 nA/10 kV Probe size: 100 nm at 100 nA/10 kV Probe current: 10 pA to 500nA Current stability: 0.5 %/h