Field emission emitters.
The cold field emitter tip has the highest brightness of presently known emitters and is therefore the preferred choice for obtaining highest possible electron density in the smallest spot making such JEOL SEMs superbly suited to obtain high resolution, high quality images - especially at very low acceleration voltages. Extra advantages of cold emitters are their long lifetime and ease of use, which reduces the cost of ownership.

The Schottky type field emitter tip is a larger and heated tip able to supply a higher and very stable beam current. The special gun design of the new JEOL Schottky-type SEM can supply a very high beam current ideal for applications demanding higher beam currents than earlier possible with any FE-SEM.

Optical designs.
Depending on the intended use of the FE-SEM, there are different optical designs - the in-lens, the new semi-in-lens, the strongly excited conical objective lens and the conventional design. Each design is optimized for different purposes.

FE-SEMs with cold emitters:

The in-lens design (JSM-6000F) has a very short focal length to give a smallest possible intense spot of electrons. This is obtained by placing the sample completely inside the strong magnetic field of the objective lens. The strong field will also efficiently trap all secondary electrons and guide them to the detector. The design of the beam forming optical system and the specimen stage is similar to a transmission electron microscope.

This design gives the ultimate in resolution at medium to high accelerating voltages but limits the size of the specimen to a few millimetres. The strong field will also strongly interfere with samples influenced by magnetic fields.

The conventional design (JSM-6335F) is optimized to combine the flexibility of a conventional tungsten emitter SEM with a dramatically improved resolution at all working distances and acceleration voltages. In this design the magnetic field is completely confined inside the objective lens with the single secondary electron detector located in the specimen chamber.

The strongly exited conical lens design (JSM-6700F) combines the best features from the in-lens, the semi-in-lens and the conventional designs, giving very high resolution at both low and high voltages as well as high resolution at both long working distance and large beam current. It can also handle up to 8 inch specimen through a new type of airlock.

The new semi-in-lens design (JSM-7400F) together with electron filtering and further enhanced electron optics makes this new model the JEOL's highest resolution SEM yet - and still handling up to 8 inches specimen.

FE-SEM with Schottky emitter:

The combination of a unique in-lens gun with Schottky emitter with the strongly exited conical lens design (JSM-6500F , JSM-7000F) give instruments with both high resolution at all voltages and working distances and exceptional analytical capabilities. A continuously variable stable beam current of up to 200 nA makes these ideal platforms for WDS (wave dispersive X-ray spectrometer), EBSP (electron backscattering patterns) cameras, CL (cathode luminescens) spectrometers, EB (electron beam lithography) and double beam FIB applications as well as for normal EDX (energy dispersive X-ray spectrometers)

To preserve the clean vacuum required for high resolution work and long emitter lifetime, all these instruments are equipped with airlock for specimen exchange.

The powerful yet easy-to-use control systems are based on PCs with MS Windows NT and 2000 .

	JSM-6000F
	Specifications Resolution: 0.6 nm at 30 kV 3.0 nm at   1 kV Emitter Cold FE Magnification 10 - 950,000 X Stage XY 2.4 x 8 mm Stage Z 0.6 mm Sample size 6 x 23 x 3(H) mm Tilt ± 30º
	JSM-6335F
	Specifications Resolution: 1.5 nm at 15 kV 5.0 nm at   1 kV Emitter Cold FE Magnification 10 - 500,000 X Stage XY 50x70 mm Stage Z 4 - 39 mm Sample size 100 mm max. Tilt - 5º to + 60º
	JSM-6700F
	Specifications Resolution: 1.0 nm at 15 kV                      2.2 nm at   1 kV Emitter Cold FE Magnification 25 - 650,000 X Stage 1.XY 50x70 mm Stage 2.XY 110x80 mm Stage Z 1.5 - 25 mm Rotation 360º eucentric Sample size 150 mm max. 200 mm option Tilt - 5º to + 60º
	JSM-7400F
	Specifications Resolution: 1.0 nm at 15 kV                      1.5 nm at   1 kV Emitter Cold FE Magnification 25 - 650,000 X Stage 1.XY 50x70 mm Stage 2.XY 110x80 mm Stage Z 1.5 - 25 mm Rotation 360º eucentric Sample size 204 mm max. Tilt - 5º to + 60º
	JSM-6500F
	Specifications Resolution: 1.5 nm at 15 kV 5.0 nm at   1 kV Emitter Schottky TFE Magnification 10 - 500,000 X Stage 1.XY 50x70 mm Stage 2.XY 110x80 mm Stage Z 1.5 - 41 mm Rotation 360º eucentri c Sample size 150 mm max. 200 mm option Tilt - 5º to + 60º
	JSM-7000F
	Specifications Resolution: 1.2 nm at 15 kV 3.0 nm at   1 kV Emitter Schottky TFE Probe current 10-12 to 2x10-7 A Magnification 10 - 500,000 X Stage 1.XY 50x70 mm Stage 2.XY 110x80 mm Stage Z 1.5 - 41 mm Rotation 360º eucentric Sample size 150 mm max. 200 mm option Tilt - 5º to + 60º