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  Low vacuum SEMs

These instruments are conventional SEMs with the added capability to also work with poorer vacuum in the specimen chamber. The vacuum level in the chamber is automatically maintained at a settable value by a separate extra pump with a large foreline trap and an unique type of vacuum orifice protecting the column and objective lens apertures. The detector most often used in LV-mode is a patented 3 elements solid state detector which gives both topographic images and Z-contrast images. 

When operated at normal high vacuum levels the performance of these SEMs is identical to the equivalent conventional model. 

Important extra possibilities obtained by the LV technique are: 

Study of samples with poor or no electrical conductivity which conventionally are either coated with an electrically conductive coating (which takes time and hides the true surface) or studied at low voltages (which does not give backscatter or X-ray information). Working in LV-mode at a typical optimum pressure in the range of 20 Pa will neutralize the build-up of the negative electrostatic charge on the sample with the positive ions generated in the chamber gas. Not only can excellent topographic images be obtained but also both backscatter images with compositional Z-contrast and X-ray analysis. 

Study of samples containing volatile substances (e.g. water, oils) which normally require drying by advanced and/or time consuming methods. In LV-mode such samples can often be studied directly. If required, the vapour pressures can be further reduced by cooling the sample. 

All models are highly automated and operated in an easy intuitive way from a PC with MS Windows combined with a simplified control panel. Networking makes handling, archiving and transfer of the digital images easy. The differences are mainly related to the size of the eucentric specimen stage and its movements. All microscopes are optimized for fitting and integrating X-ray spectrometers. 

A wide range of optional accessories are available for all models. 
   
 

JSM-5510LV-LGS              

Specifications
Resolution HV-mode: 3.5 nm at 30 kV
Resolution LV-mode:  4.5 nm at 30 kV
LV pressure range: 1 to 270 Pa
Acc. Voltage: 0.5 to 30 kV
Stage movements: 40 x 80 mm
 

JSM-6060LV               

Specifications
Resolution HV-mode: 3.5 nm at 30 kV
Resolution LV-mode:  4.0 nm at 30 kV
LV pressure range: 1 to 270 Pa
Acc. Voltage: 0.5 to 30 kV
Stage movements: 10 x 20 mm
 

JSM-6380LV                new14.gif 

Specifications
Resolution HV-mode: 3.0 nm at 30 kV
Resolution LV-mode: 4.0 nm at 30 kV
Acc. Voltage: 0.5 to 30 kV
Magnification: 5 - 300,000 X
Stage: 40 x 80 mm
Motorized: 5-axis option
Alignment: Electronic
 

JSM-6480LV               new14.gif

Specifications
Resolution HV-mode: 3.0 nm at 30 kV
Resolution LV-mode: 4.0 nm at 30 kV
Acc. Voltage: 0.3 to 30 kV
Magnification: 5 - 300,000 X
Stage: 100 x 125 mm
Motorized: 5-axis standard
Alignment: Electronic

 

   
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  Updated December 16, 2004