Scanning probe microscopy (SPM) is a generic term for a group of techniques that scan a fine probe (or tip) over a surface, either  very close to the surface or just touching it, constantly or intermittently.  The tip is moved using very sensitive piezoelectric elements with such precision that atomic resolution can be achieved in many of the operating modes.

The operation modes can be divided into two principal technique groups – Scanning Tunnelling Microscopy (STM) and Atomic Force Microscopy (AFM). 

STM requires conductive samples and generates images with atomic resolution showing how the  tunnelling current changes with distance between the tip and the sample.  A number of spectroscopic methods are also associated with this technique. 

AFM works also on non-conductive samples and measures the interatomic attractive or repulsive forces. With AFM it is generally harder to achieve atomic resolution. There is a large number of derived techniques that are able to measure the mechanical, electrical, magnetic and chemical properties of surfaces.

JEOL manufacture a range of SPM instruments for use in ultra-high vacuum and an environmental SPM – all models able to be operated at high or low temperature. 

UHV instruments are normally used to observe atomically clean surfaces at atomic resolution and for initiation, deposition or oxidation studies, whereas the environmental SPM can examine samples under "real world" conditions.  The UHV instruments are available in conventional or analytical configurations - meaning that chemical and crystallographic analysis can be carried out in the same UHV environment.

All models feature easy to use Windows software for instrument control and data processing.

	JSPM-5700 Large size specimen SPM
	This instrument is designed for observation of both small and large (200mm) specimen. It uses a new PZT cantilever eliminating the need for laser alignment allowing even novice routine users to easily operate it.
	JSPM-5200 Environmental SPM
	Specifications AFM resolution: Atomic resolution STM resolution: Atomic resolution System drift:  0.05 nm/s or less Temp. range:  -143ºC to 500ºC Pressure range: Atm. to 10-3 Pa (option) Fluid cell: Optional Supports all major SPM functions
	JSPM-4610 UHV SPM
	Specifications AFM resolution: Atomic resolution STM resolution: XY 0.14nm, Z 0.01nm System drift: 0.05 nm/s Temp range: 20ºK to 1500ºK Pressure: < 5x10-8 Pa Options:  SEM, FE-SEM, RHEED etc.
	JSPM-4500 Analytical UHV SPM
	Specifications AFM resolution: Atomic resolution STM resolution: XY 0.14nm, Z 0.01nm System drift: 0.05 nm/s Temp range: 20ºK to 1500ºK Pressure: < 5x10-8 Pa Options:  SEM, FE-SEM, RHEED, XPS, AES, LEED etc.