Angstrom ( in original Swedish spelling Ångström). Unit of length 1Å = 0.1 nm = 10^-10m.

BEI. Often used abbreviation for backscatter electron image.

CL. Sometimes used abbreviation for cathode luminescens, the emission of light from an area radiated by electrons. The light can be detected by a photomultiplier tube and used for imaging in a SEM.

CRT. Abbreviation for cathode ray tube used as display screen in SEM and PC.

EBIC. Abbreviationfor electron beam induced current, the current induced in a semiconductor p-n junction when irradiated by electrons  which can be detected and used for imaging in a SEM.

EBSP. Abbreviation for electron backscatter patterns, a method to investigate crystallographic properties of a sample in a SEM by placing a stationary beam on the sample and record the patterns of backscattered electrons emitted from that area. The recording is done by making the electron pattern visible on a fluorescent screen and record the image with a TV camera.

EDS. Abbreviation for energy dispersive detector, a semiconductor device used in X-ray spectrometers to detect and measure the energy of X-rays emitted from a sample. 

EDX. Abbreviation for energy dispersive X-ray (spectrometer), see EDS.

EPMA. Abbreviation for electron probe microanalyzer, mainly used by JEOL.

Everhart-Thornley detector. The dominating type of detector for secondary electrons in SEMs. The low energy secondary electrons emitted from the sample are attracted by the detector's positive voltage bias and are further accelerated so that they strike the scintillating surface layer on the detector with enough energy to excite light emission. The emitted light is guided into a photomultiplier tube which amplifies the signal and converts it into an electric signal fed into the video amplifier of the SEM.

LAB6. Often used writing for lanthanum hexaboride or LaB₆ which is a material sometimes used as electron emitter in SEMs and TEMs.

LV. Abbreviation used by JEOL for low vacuum in the concept of LV-SEM. This is a SEM designed to be able to also work with much poorer vacuum in the specimen chamber. Abbreviations used by other companies are also CP (for controlled pressure), and VP (for variable pressure). ESEM (for environmental scanning electron microscope) is another abbreviation for a similar concept.

Pa. Standard abbreviation for Pascal, the unit used to measure gas pressure or vacuum. One Pascal is equal to 7.5 x 10^-3     Torr, the earlier used unit.

PMT. Sometimes used abbreviation for photomultiplier tube, a device used to amplify the light generated when electrons hit the scintillator in an Everhart-Thornley type detector for secondary electrons.

RP. Abbreviation used by JEOL for rotary pump, the roughing pump type used for backing high vacuum pumps and for the initial evacuation of the air from the specimen chamber and the electron optical column. The pressure obtainable with a rotary pump is in the order of 1 Pa.

SEI. Often used abbreviation for secondary electron image.

SAM. Sometimes used abbreviation for scanning Auger microscope or microprobe, an ultrahigh vacuum scanning electron microscope with an electron energy spectrometer for detecting and analysing the Auger electrons emitted from the top surface layers of the sample.

SEM. Standard abbreviation for scanning electron microscope.

STEM. Standard abbreviation for scanning transmission electron microscope or microscopy, where a focused beam of electrons are scanned across the sample and electrons transmitted through the sample are detected and used for making an image. This technique is used both in SEM, TEM and in dedicated STEM instruments.

TEM. Standard abbreviation for transmission electron microscope or microscopy.

UHV. Standard abbreviation for ultra high vacuum

WD. Abbreviation for working distance, the distance between the observed surface of the sample and the bottom surface of the objective lens. This concept is mainly used for scanning electron microscopes where this distance can be changed by raising or lowering the specimen stage. Typically this distance can be varied between a few millimetres to 30-40 mm. In general the resolution will be better closer to the lens while the depth of focus improves with longer working distance.

WDS. Abbreviation for wave dispersive detector, an X-ray spectrometer based on Bragg reflection by a crystal lattice. This type of spectrometer gives a much better X-ray wavelength resolution than the EDS type of spectrometer. WDS are used in electron probe microanalyzers and sometimes in SEMs.